Plasmonic Split-Trench Resonator for Trapping and Sensing

On-chip integration of plasmonics and electronics can benefit a broad range applications in biosensing, signal processing, optoelectronics. A key requirement is chip-scale manufacturing method. Here, we demonstrate split-trench resonator platform that combines high-quality-factor resonant plasmonic biosensor with radio frequency (RF) nanogap tweezers. The simultaneously serve as dielectrophoretic trap nanoplasmonic sensor. Trapping accomplished by applying an RF electrical bias across 10 nm gap, thereby either attracting or repelling analytes. Trapped analytes are detected label-free manner using refractive-index sensing, enabled interference between surface-plasmon standing waves the trench light transmitted through gap. This active sample concentration mechanism enables detection nanoparticles proteins at low pM. We manufacture centimeter-long cavity resonators high throughput via photolithography atomic layer deposition, toward practical spectroscopy,